What are the application areas of MEMS?

MEMS devices and systems have the advantages of small size, light weight, low power consumption, low cost, high reliability, excellent performance, powerful functions, mass production and other traditional machinery incomparable advantages, and are widely used in many fields.

⒈ Information industry

The development of information technology puts forward higher requirements for equipment, which is more powerful while shrinking in size. From the perspective of multimedia human-machine interface (HI), both voice input using micro-microphones and graphic input using micro-camera systems have a broad market, and the micro-intelligent robots being vigorously developed today are one of the highest goals of the control system. The micro-gyro is mounted on the mouse to stabilize its movement, and the micro-devices integrated with the micro-machine and its control circuit can be mounted on the magnetic head to greatly improve the accuracy of running on the track (<0.1μm) and increase the track density of the disk. As for the use of micro-nozzle for printing, it has already been reported.

⒉ Aviation and aerospace industry

Due to the high cost of satellites and their launches, workers have already proposed concepts such as small satellites, micro satellites, micro satellites, and nano satellites. At an international conference in 1995, someone proposed to develop an all-silicon satellite, that is, the entire satellite is composed of silicon solar panels, silicon navigation modules, and silicon communication modules. This can reduce the weight of the entire satellite to a kilogram. The cost of satellites is greatly reduced, making a denser distributed satellite system a reality.

It is also worth mentioning that MEMS has improved the performance of aircraft. In the future, various SMART sensors, including mechanics, acoustics, airflow, etc., can be installed in key parts of aircraft to provide timely information and perform real-time control of various executive components, thereby making the flight more Stable, noise is greatly suppressed, and fuel is saved.

⒊ Medical and biotechnology

The typical size of biological cells is 1-10 μm, and the thickness of biological macromolecules is on the order of nanometers and the length is on the order of micrometers. The size of devices manufactured by micromachining technology is within this range, so it is suitable for manipulating biological cells and biological macromolecules. All kinds of micro pumps, micro valves, micro tweezers, micro grooves, micro vessels and micro flow meters can all be manufactured using MEMS technology.  Using this technology, a chip containing 100,000 DNA fragments can be made on a silicon wafer the size of a fingernail, which is undoubtedly extremely important for genetic research, disease diagnosis, detection, and treatment. The DNA chip produced by Stanford and Affmetrix Company detects DNA genes by etching very small patterns on glass. The chip has been able to detect more than 6000 DNA gene fragments.

⒋ Environmental Science

Micro-measurement and analysis equipment composed of chemical sensors, biological sensors and data processing systems manufactured by MEMS is used to detect the chemical composition of gases and liquids, and to detect nuclear organisms, chemical substances and toxic substances. Its advantages are small size and low price. , Low power consumption, easy to carry.

The University of Michigan in the United States published a prototype of a wireless micro-system for environmental monitoring—μCluster, which is composed of three blocks: wireless communication, micro-system control, and sensor front end. The volume of the microsystem is 10cm3 when it is not packaged. When the scanning speed is low, the power consumption is less than 1mW, the telemetry radius is 50m, the pressure measurement range is 80KPa～105KPa, and the accuracy is ±13Pa. This system has been used in the US Navy.

If you want to know more, our website has product specifications MEMS, you can go to ALLICDATA ELECTRONICS LIMITED to get more information